Semiconductor/LCD

Products Used By Our Customers for Semiconductor Applications

(Datasheet.PDF)		 Absolute Filter II THINFIL (Low Profile) Absolute Mini-Pleat ULPA Filter
The Absolute II ULPA filter is a low pressure drop, low power consumption mini-pleat filter. It is the perfect choice for cleanrooms and clean process equipment in the semiconductor industry, biopharmaceutical facilities and, animal handling, and sterile environments. A space saving design accommodates older and newer installation locations. Every Absolute II filter is scan tested to ensure 99.999%+ efficiency (0.1-0.2 um) at 0.5m/s. Custom sizes are available.

(Datasheet.PDF)		 Absolute Filter THINFIL (Low Profile) Absolute Mini-Pleat HEPA Filter
The Absolute HEPA mini-pleat filter is space saving and lightweight. It is absolutely the best choice for cleanrooms and clean bench equipment. It is used in a variety of industries including semiconductor and microelectronics, pharmaceutical, bio-medical, research facilities, and food processing. Custom sizes are available.

(Datasheet.PDF)		 Absolute Filter V Bank High Airflow Volume V Type Mini-pleat Filter
The Absolute Filter V Bank is Cambridge’s contribution to the energy efficient “Green” movement and offers extremely low pressure drop (1″ w.g. @ 2120 CFM versus 1.4″ w.g. for standard high capacity filters) for clean environments with high airflow needs, such as HVAC air handling equipment. Available in either HEPA or ULPA efficiency with Glass GIGA, GIGA Master or PTFE ULPA filter media. This filter replaces your existing high capacity, high pressure drop filter; no retro-fitting is required. The Absolute V Bank is setting the standard for high airflow applications with low energy consumption in super clean environments. Go V Bank = save $$$.

(Datasheet.PDF)		 Absolute Filter II Separator ULPA Filter Std./Low Pressure Drop
Cambridge Filter’s Absolute II separator-type filter is a low power consumption (99.999% efficient at 0.1-0.2um) ULPA filter. Low pressure drop models are also available. All KI ULPA Filters are subjected to a scan test to guarantee a leak-free filter. Low pressure drop models and custom sizes are available.

(Datasheet.PDF)		 Absolute Filter Separator HEPA Filter Standard/High Airflow
Our separator-type Absolute Filter is used for clean environments with high airflow. It offers low pressure drop and low power consumption. The Absolute Filter separates itself from the competition. Standard and high airflow volume models are available. Custom sizes are also available.

(Datasheet.PDF)		 Aero-Answer ® Mate Med/High Efficiency Mini-Pleat Filter
Need a medium/high efficiency filter? If your ANSWER is yes, Aero-Answer ® Mate is the filter for you. 75% thinner than standard separator-types, they are ideal pre-filters for AHUs in clean environments, bio-medical facilities, and commercial buildings. 60-65%, 90-95%, and 98% efficiencies are available as well as custom sizes.

(Datasheet.PDF)		 Aero-Answer ® Long Med/High Efficiency Doubled Service Life
The Aero-Answer ® Long is KI’s space saving, long service life medium/high efficiency filter. The Aero-Answer ® Long is ideal for pre-filtration in clean environments, AHU systems, medical facilities, and commercial buildings. They are 50% thinner than standard separator-type filters. Aero-Answer Long filters are available in 60-65%, 90-95%, or 98% efficiencies as well as custom sizes.

(Datasheet.PDF)		 Aero-Answer ® Pack Med/High Efficiency Cartridge Filter
The Aero-Answer ® Pack is the ANSWER to your medium/high efficiency, space saving needs. All of our Aero-Answer ® Packs have 6-inch depth holding frames. The Aero-Answer ® Pack has easy media pack replacement with re-usable frames making it an economical choice where an incinerable filter is desired to reduce industrial waste. 60-65%, 90-95%, and 98% efficiencies available. Standard and custom sizes also available.

(Datasheet.PDF)		 Aero Answer ® Wing-Pleat Med/High Efficiency High Airflow V-Bank
The Aero Answer ® Wing-Pleat is a medium/high efficiency V Bank filter with a service life up to three times longer than comparable products with the same depth. The media pack is easy to replace and both upstream and downstream replacements are available. Media packs may be incinerated after use reducing industrial waste. Pre-filters with 15 mm depths may be attached to the upstream face. The Aero Answer ® Wing-Pleat is available in 60-65%, 90-95%, 98% efficiencies and of course, custom sizes are available.

(Datasheet.PDF)		 Neo-Flo G Filter Bag Type Medium / High Efficiency
Neo-Flo G is a low pressure drop, long service life bag-type filter. Its tapered bag design utilizes more media than conventional bag designs, adding service life to the filter. The Neo Flo G is light weight and easy to handle. 60%+, 80%+, and 90%+ efficiencies available. Custom sizes are available.

(Datasheet.PDF)		 Neo-Cap Filter Bag Type Particle Filter
The Neo-Cap conventional bag-type filter offers high particle retention volume, long service life, is light weight and easy to handle. Its efficiency is 32%+. The Neo-Cap is a great solution for general air handling systems.

(Datasheet.PDF)		 ChemArrest ® Mini-Pleat Activated Carbon Mini-Pleat Filter
The ChemArrest ® CBM filter is Cambridge’s mini-pleat chemical filter for cleanrooms, fan filter units (FFUs), and other sensitive manufacturing tools. CBM filters offer long service life, low pressure drop, and minimal particle emission. They can be layered for multistage applications to arrest multiple contaminants. They are often applied with ULPA/HEPA filters. CBM can remove acids, alkali, and organic compounds. Custom sizes are available.

(Datasheet.PDF)		 ChemArrest ® Separator Type Separator-Type Activated Carbon Filter
CBL is the ChemArrest ® Series’ separator-type chemical filter. It is used for recirculation, make-up and return air handling, and in cleanroom and other sensitive manufacturing facilities. Low pressure drop models are available. Custom sizes are available.

(Datasheet.PDF)		 GIGA Master Extremely Low Boron/Organic Mini-Pleat ULPA/HEPA
The world’s first ultra high-efficiency filter specifically created for the next generation of semiconductor, and liquid crystal manufacturing. The space saving mini-pleat GIGA Master boasts minimal Boron outgassing and can reduce the amount of organic contaminants on wafers to 0.05ng/cm2 (1/300th the amount from traditional filters). GIGA Master is most often used for ceiling systems, and manufacturing/fab tools. All GIGA’s are Silica scan tested (PSL testing available by request). Offered in HEPA and ULPA level efficiencies. Custom sizes are available.

(Datasheet.PDF)		 PTFE GIGA Boron-Free Mini-Pleat ULPA+ Filter
The World’s first ultra high-efficiency filter specifically created for the next generation of semiconductor and liquid crystal manufacturing. The PTFE GIGA brags ZERO Boron outgassing and can reduce the amount of organic contaminants on wafers to 0.05ng/cm2. Offered in low pressure drop and high efficiency models. The efficiency range is 6N – 7N at 0.1um. All GIGA’s are Silica scan tested (PSL testing available by request). Custom sizes are available.

(Datasheet.PDF)		 Glass GIGA Xtra Low Organic/Boron Mini-Pleat ULPA/HEPA
The world’s first ultra high-efficiency filter specifically created for the next generation of semiconductor and liquid crystal manufacturing. The Glass GIGA Xtra is minimal Boron outgassing, and reduces the amount of organic contaminants on wafers to 1.0ng/cm2 (1/16 the amount of silica tested conventional filters). This GIGA filter is offered in HEPA and ULPA level efficiencies (to 5N7). All GIGA’s are Silica scan tested at our factory (PSL testing available by request). Also available in separator-type. Custom sizes are available.

(Datasheet.PDF)		 Glass GIGA Low Boron Mini-Pleat ULPA/HEPA
The world’s first ultra high-efficiency filter specifically created for the next generation of semiconductor and liquid crystal manufacturing. The Glass GIGA brags minimal Boron outgassing (1/100 in comparison with Silica tested conventional filters), and reduces organic compound generation by 1/2. Glass GIGAs are offered in HEPA and ULPA level efficiencies to 5N7. Also available in separator-type. All GIGA’s are Silica scan tested (PSL testing available by request). Custom sizes are available.

(Datasheet.PDF)		 GIGA Master Extremely Low Organic/Boron Separator Type
The world’s first ultra high-efficiency filter specifically created for the next generation of semiconductor and liquid crystal manufacturing. The GIGA Master separator-type filter boasts minimal Boron outgassing, and can reduce the amount of organic contaminants on wafers to 0.05ng/cm2 (1/300th the amount from traditional filters). These are available in HEPA and ULPA level efficiencies (up to 5N7). Our HEPA level also has a high airflow volume model. All GIGA’s are Silica scan tested (PSL testing available by request). Custom sizes are available.

(Datasheet.PDF)		 Glass GIGA Xtra Low Organic/Boron Separator Type ULPA/HEPA
The world’s first ultra high-efficiency filter specifically created for the next generation of semiconductor and liquid crystal manufacturing. The Glass GIGA Xtra Separator-type is minimal Boron outgassing, and reduces the amount of organic contaminants on wafers to 1.0ng/cm2 (1/16 the amount of conventional silica tested filters). This GIGA filter is offered in HEPA, and ULPA level efficiencies (to 5N7). These are factory Silica tested, PSL testing is available by request. Glass GIGA Xtra is also available in a mini-pleat version, and a high airflow volume HEPA model. Custom sizes are available.

(Datasheet.PDF)		 Glass GIGA Low Boron Separator Type
The world’s first ultra high-efficiency filter specifically created for the next generation of semiconductor and liquid crystal manufacturing. The Glass GIGA separator-type brags minimal Boron outgassing (1/100 in comparison with Silica tested conventional filters), and reduces the amount of organic compound generation by 1/2. Glass GIGAs are offered in HEPA and ULPA level efficiencies to 5N7. We have HEPA level efficiency in a high airflow volume model. All GIGA’s are Silica scan tested (PSL testing available by request). The Glass GIGA is also available in a mini-pleat version. Custom sizes are available.

(Datasheet.PDF)		 GIGA CP Low Organic/Boron Med Eff Separator Type
The GIGA CP is a medium efficiency, low organic compound generating, low Boron generating filter with non-woven media. This is a separator-type filter with 90%+ arrestance efficiency. Custom sizes are available.

(Datasheet.PDF)		 PTFE Filter Mini-Pleat ULPA Filter for Corrosive Environments
This product is ideal for corrosive gas environments because, unlike conventional glass fiber media, no boron is generated by hydrofluoric acid reacting with the filter components. Offered in efficiencies of 6N+ and 7N+, you can choose from our low pressure drop type or high efficiency type. All PTFE filters are Silica scan tested in our factories. Custom sizes are available.

(Datasheet.PDF)		 High Temp. Absolute Filter Separator/HEPA Filter
Applications for our High Temperature Absolute Filter include pharmaceutical manufacturing processes, high temperature drying, and sterilization. These HEPA filters’ maximum operation temperatures differ by application, and range from 150 to 230 degrees Celsius (302 to 446 Fahrenheit). High airflow volume types are available. Custom sizes are also available. For Medium efficiency High Temperature Filters, contact us.
Ceil-Flo ® Aluminum Housing Ducted Terminal Module
The Ceil-Flo ® is Cambridge’s Aluminum ducted terminal filter module. These are available with HEPA, ULPA or PTFE filters to meet your specific needs. These offer convenient room-side or top-side replaceable filter designs or as a disposable unit, as well as durable but light aluminum construction, and multiple size duct connections (8″, 10″ and 12″). The Ceil-Flo ® is easily integrated into new or existing ceiling grid systems. Standard and custom sizes available.
NeoStream Fan Filter Unit (FFU) for Clean Process Tools
This product is temporarily unavailable.

(Datasheet.PDF)		 Ion Gun Clean Suite Series
The Cambridge Ion Gun prevents surface ESD in semiconductor fab processes. Its features include a EUV (soft X-Ray) system that provides high ionization levels with zero contaminant generation, ozone-less clean air preventing surface oxidization, and it may be implemented for ESD prevention in a variety of applications. Contact a sales representative for more information.

(Datasheet.PDF)		 Super Hi-Temp 660F(350C) Separator Type Hi-Temp Absolute HEPA Filter
The Super High Temperature Absolute Filter from Cambridge has raised the limit for air filtration in extreme environments and goes where no other filter can. This Absolute filter operates comfortably at 660F (350C) with minimal particle generation compared to conventional hi-temp filters and has a ceiling temperature of 750F (400C). Whether your process requires HEPA (99.97%) or semi-HEPA (95%) level air filtration, the Super High Temperature Absolute Filter produces clean air with minimal particle generation and is generally suited for Pharmaceutical, Food Processing and Research applications.