Clean Suite

The Clean Suite Series of Air Filtration Products from Cambridge


(Datasheet.PDF)
Ion Gun Clean Suite Series
The Cambridge Ion Gun prevents surface ESD in semiconductor fab processes. Its features include a EUV (soft X-Ray) system that provides high ionization levels with zero contaminant generation, ozone-less clean air preventing surface oxidization, and it may be implemented for ESD prevention in a variety of applications. Contact a sales representative for more information.